Photonic MEMS Devices: Design, Fabrication and Control (Optical Science and Engineering Series)
by Ai-Qun Liu
ISBN 13: 9781420045680
Format: Hardcover (504 pages) Publisher: CRC Press Published: 17 Sep 2008
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RF MEMS Switches and Integrated Switching Circuits: Design, Fabrication and Test (MEMS Reference Shelf)
ISBN 13: 9780387462615
Format: Hardcover (310 pages) Publisher: Springer Published: 06 Sep 2010